Overview

PLD (Pulsed Laser Deposition) is a physical deposition method that utilizes a high energy

focused laser. Conceptually and experimentally. PLD is extremely simple. It consists of a

target holder and a substrate holder housed in a vacuum chamber. A set of optical

components focus and raster a high-power laser (the external source) into a

concentrated beam over the target surface which vaporizes target materials to

ultimately deposite thin film.

Advantages

≻ Allows for the use of various targets and for the in-situ deposition of multi-layers

≻ Consists of simple hardware

≻ Simple system maintenance

≻ Various aspect of beam-target-substrate positioning

≻ Temperature uniformity of substrate

≻ Pyrometer Port

≻ Laser strength measurement port

≻ Ellipsometry port